Parametric Model Identification of Axisymmetric MEMS Resonators

This paper proposes a technique for developing parametric models of modally degenerate resonators from stimulus-response data. The complements traditional empirical frequency response estimates that are commonly used testing MEMS resonators, however, the have distinct advantages when modal differences close enough to frustrate quality factors, natural frequencies and mode orientations. proposed also completely rejects parasitic coupling between stimulus pick-off electrodes. It is shown how modification algorithm using demodulated measurement signals greatly reduces storage computational requirements. [2020-0281]